SIMS: Basic Principles and Components

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Particle Diagnostics. Secondary Ion Mass Spectrometry (SIMS)
This module deals with methods which utilize heavy particles (protons and other ions) as primary bombarding particles. In SIMS sputtering yield is being analyzed, giving great information on surface composition.

Impartido por:

  • Sadovsky Yaroslav

    Sadovsky Yaroslav

    Assistant

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